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The silicon atom density is 5 × 1022 cm-3. If dopant concentration is 10×15 cm-3 of boron, how far are the boron atoms from each other?
What is the theoretical maximum etch rate of a 200 mm diameter silicon wafers when chlorine flow is 100 sccm (standard cubic centimetres per minute)?
Aluminium wires do not tolerate current densities higher than 1 MA/cm2. What are maximum currents that can run in micrometre aluminium wiring?
The sheet resistance of a typical aluminium metallization is 0.03 ohm/sq. What is aluminium thickness?
What should the AFM-tip radius be so that resolution is tip-limited? Estimate the analytical radius of electron microprobe (EMPA).
What is the difference between the oxidation rates of boron, phosphorus and arsenic doped wafers when all have identical doping levels?
Calculate boron updiffusion for different epitaxy conditions when the buried layer doping is 1018 cm-3 and epilayer doping is 1015 cm-3.
If 20 nm of nickel reacts with overabundance of silicon, how thick a layer of NiSi will be formed? Densities: Si-2.3 g/cm3, Ni-8.9 g/cm3 , NiSi-7.2 g/cm3.
If silane (SiH4) flow in a single-wafer (150 mm) PECVD reactor is 5 sccm (cm3 /min), what is the theoretical maximum deposition rate of amorphous silicon?
If the cell area is 1µm2, with a 4 nm oxide as the capacitor dielectric, and the operating voltage is 2 V, calculate number of electrons stored in memory cell.
What is the maximum ingot size that can be pulled before the silicon yields catastrophically? What is the COP density on the wafer surface?
Electronic polysilicon is available with 0.01 ppb phosphorous concentration. What is highest ingot resistivity that can be pulled from such a starting material?
Calculate an estimate for silicon lattice constant from atomic mass and density.
How does the thermal oxide thickness on a phosphorus-doped wafer change with dopant concentration?
Discuss the character of Achilles in light of this statement. Use plenty of examples, details, references, and quotations in the response.
If we had an Olympic swimming pool full of UPW, how many droplets of sweat can be dissolved before Na+ and Cl- exceed the specification level of 0.1 ppb?
If there is one monolayer coverage of organic contamination on the wafer, how much is that counted as carbon atoms/cm2?
Etch rate could basically be measured easily by weighing the sample before and after etching. What resolution scale is needed to determine rates for?
What is the best possible resolution in optical contact lithography? Make a graphical presentation of projection lithography resolution versus depth of focus!
What process and materials parameters do you need to know in order to estimate the electron beam heating of a mask plate and resist during EBL?
What is the smallest possible feature size that can be written with a 50 keV electron beam?
Oxygen is soluble into titanium up to 34 atomic%. What will be the thickness of a silicon dioxide film that can be dissolved by a 50 nm-thick titanium film?
So, what was the Cold War? In simple terms the Cold War was the non-shooting war, i.e., the non "hot" war, waged between the United States and its allies.
List one line spoken by one of the characters and describe how the others in the scene react to what is said.
Why does comparative advantage matter more than absolute advantage for trade? What factors are most important for economic growth?