What is breakdown field requirement for low-k dielectrics, Chemistry

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What is breakdown field requirement for low-k dielectrics

Problem

1. If a 2:1 aspect ratio via plug in 0.25µm technology has a resistance of 0.4 Ω, is it made of tungsten or copper?

2. What is copper plug resistance in 0.1µm technology?

3. What is the breakdown field requirement for low-k dielectrics?

The response should include a reference list. Double-space, using Times New Roman 12 pnt font, one-inch margins, and APA style of writing and citations.

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Chemistry: What is breakdown field requirement for low-k dielectrics

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Chemistry: What is breakdown field requirement for low-k dielectrics

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