How thick oxide layer is needed to mask boron implantation, Chemistry

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How thick oxide layer is needed to mask boron implantation

Problem

1. What is the range of 100 keV germanium implantation?

2. How thick an oxide layer is needed to mask boron implantation? Present your results as a function of boron energy.

3. Check by simulator the range of 100 keV phosphorus ions and compare it with the simple estimate discussed in the text.

4. At what energy is electronic and nuclear stopping equal for phosphorus?

The response should include a reference list. Double-space, using Times New Roman 12 pnt font, one-inch margins, and APA style of writing and citations.

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