Problem
1. What process and materials parameters do you need to know in order to estimate the electron beam heating of a mask plate and resist during EBL? How does beam-induced heating affect line width control?
2. Use a laser printer to make simple line/space test structures with 600 dpi and 1200 dpi resolutions, and check by microscope for line widths, line edge roughness and reproducibility.
The response should include a reference list. Double-space, using Times New Roman 12 pnt font, one-inch margins, and APA style of writing and citations.