It is observed that the sidewall slope in an etch process
It is observed that the sidewall slope in an etch process becomes more sloped as the temperature is reduced. Why?
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if the anisotropy of an etch process is 045 sketch the etch profilewhat percentage of the etch rate in the vertical
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it is observed that the sidewall slope in an etch process becomes more sloped as the temperature is reduced whythe
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