Rc time constant for polysilicon interconnection runner


Question 1) Compute RC time constant for the 1cm long doped polysilicon interconnection runner on the 1μm thick SiO2. Polysilicon has the thickness of 5000Ao and a resistivity ρ of 1000μΩ-cm. Find the number of gates which can be included on the logic-gate array chip which is to be assembled in a 100 I/O package. Describe the thermal design considerations of packaged silicon devices. Describe the molecular beam epitaxial process for the silicon device fabrication with neat and suitable sketches of the growth system.

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Chemistry: Rc time constant for polysilicon interconnection runner
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