In any chemical fabrication process eg wet etching or cvd


In any chemical fabrication process (eg. wet etching or CVD) there are two main regions where the reaction rate is dominated by different processes. Name them and explain what each of those regions mean. Also change in what processing condition causes a significant change in the deposition or etching process? Sketch a typical curve showing how the process rate is changed by the alteration of that condition. Predict the effect of doubling the reactant concentration NG in a CVD system for both regions. Predict the effect of doubling the gas flow velocity in a CVD system in both regions?

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Electrical Engineering: In any chemical fabrication process eg wet etching or cvd
Reference No:- TGS0607401

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