If a 21 aspect ratio via plug in 025microm technology has a
1. If a 2:1 aspect ratio via plug in 0.25µm technology has a resistance of 0.4 Ω, is it made of tungsten or copper?
2. What is copper plug resistance in 0.1µm technology?
3. What is the breakdown field requirement for low-k dielectrics?
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1 if a 21 aspect ratio via plug in 025microm technology has a resistance of 04 omega is it made of tungsten or copper2
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