Calculate the junction depth where the phosphorus meets the
Phosphorus is implanted at 50 keV with a dose of 1 x 1014 cm-2.
Calculate the junction depth where the phosphorus meets the substrate (p type. 1 x 1015 cm-3) after
(a) a 900°C, three-hour anneal and
(b) a 1200°C. three-hour anneal.
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phosphorus is implanted at 50 kev with a dose of 1 x 1014 cm-2calculate the junction depth where the phosphorus meets
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