Solved: You have a job fabricating integrated circuits at intel you, Chemistry

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You have a job fabricating integrated circuits at intel you

You have a job fabricating integrated circuits at Intel. You discover that periodically the aluminum interconnects are peeling off the SiO2 dielectric layers, causing a short circuit. The aluminum is deposited by physical vapor deposition through a spun-on photoresist mask. Describe what you would do to find out what is causing the aluminum lines to peel.

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Chemistry: You have a job fabricating integrated circuits at intel you

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