What value of n in the arrival angle distribution is, Chemistry

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What value of n in the arrival angle distribution is

What value of n in the arrival angle distribution is desired for good step coverage over a step in topography? For good bottom filling of a via?

Explain with schematic diagrams.

What value of Sc, the sticking coefficient, do you want in each case? Explain with diagrams.

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Chemistry: What value of n in the arrival angle distribution is

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Chemistry: What value of n in the arrival angle distribution is

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