What are the functions of oxide layer in high quality IC? Explain.
Silicon has the unique ability to be oxidized into silica, which makes a chemically stable, protective and insulating layer on the surface of water.
The functions of the oxide layer are
(i) To mask against diffusion or ion-implant,
(ii) To passivate the surface electrically and chemically.
(iii) To isolate single device from another, and
(iv) To act as a component in MOS devices.