Resistance of 200microm long copper lines was measured to, Econometrics

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Resistance of 200microm long copper lines was measured to

1. The sheet resistance of a typical aluminium metallization is 0.03 ohm/sq. What is aluminium thickness?

2. Resistance of 200µm long copper lines was measured to be 40 ohm. From copper deposition process we know that thickness is 300 nm. What is the linewidth?

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Econometrics: Resistance of 200microm long copper lines was measured to

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Econometrics: Resistance of 200microm long copper lines was measured to

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