Plot the deposition rate on a log scale versus 1t kelvin, Engineering Mathematics

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Plot the deposition rate on a log scale versus 1t kelvin

a. Plot the deposition rate (on a log scale) versus 1/T (Kelvin), for 600-1200°C. for a CVD system with the following parameter values:

b. Redo the problem when the total pressure is decreased to 1 tort. so that he in-creases by 100 times.

Assume that the partial pressure of the incorporating species remains the same. and Cr decreases by the same factor as the total pressure.

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Engineering Mathematics: Plot the deposition rate on a log scale versus 1t kelvin

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Engineering Mathematics: Plot the deposition rate on a log scale versus 1t kelvin

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