In a 1356 mhz rf plasma operating at a pressure of 250


In a 13.56 MHz RF plasma operating at a pressure of 250 mTorr, assume Te = 20,000 K. What is the typical mean free path between electron-gas collisions? Calculate the collision frequency. How many electron collisions will occur during each applied field cycle?

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Other Subject: In a 1356 mhz rf plasma operating at a pressure of 250
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