How thick does a mask have to be to reduce the peak doping
How thick does a mask have to be to reduce the peak doping of an implant by a factor of 10,000 at the mask/substrate boundary?
Provide an equation in terms of the range and the standard deviation of the implant profile.
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how thick does a mask have to be to reduce the peak doping of an implant by a factor of 10000 at the masksubstrate
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