Gratings are often written into photoresist by interference


Gratings are often written into photoresist by interference (superposition) of optical beams. In other words, the standing wave formed by the overlap of multiple plane waves produces a (useful) exposure pattern. In this problem consider a Si wafer coated with photoresist lying in the x-y plane. Four plane waves from an Argon ion laser (l=488nm) are directed onto the sample each at 45 degrees angle of incidence. One wave arrives parallel to the +x direction, a second arrives parallel to the -x direction, a third arrives parallel to the +y direction, and the fourth arrives parallel to the -y direction.

What is the pattern formed in the photoresist?

Request for Solution File

Ask an Expert for Answer!!
Electrical Engineering: Gratings are often written into photoresist by interference
Reference No:- TGS0618203

Expected delivery within 24 Hours