Another Treasure Hunt: Repeat Problem 17.1 for either an accelerometer, an optical MEMS device, a rate gyroscope, a microfluidic component or bioMEMS device, or a chemical sensor, selecting devices other than those covered in Chapters 18-23.
Problem 17.1
A Packaging Treasure Hunt: Go to the literature (either journals or commercial web sites) and find an example of a pressure sensor other than the Motorola MAP sensor. Identify the system partitioning used, the device concept, and key details that affect either the package design or the choice of device fabrication technology.