A wafer 100mm in diameter is mounted in an electron-beam, Electrical Engineering

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A wafer 100mm in diameter is mounted in an electron-beam

A wafer 100mm in diameter is mounted in an electron-beam evaporation system in which the spherical radius is 40cm. Use Eq. 6.7 to estimate the worst-case varation in film thickness between the center and edges of the afer for an evaporated aluminum film 1 um think.

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Electrical Engineering: A wafer 100mm in diameter is mounted in an electron-beam

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Electrical Engineering: A wafer 100mm in diameter is mounted in an electron-beam

Reference No:- TGS0585905

Have a Question? (oR Write a Review)

Recent Questions Asked Electrical Engineering

Q : How can you make a low-pass filter with proper cut-off

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Ask an Expert for Answer!!

Electrical Engineering: A wafer 100mm in diameter is mounted in an electron-beam

Reference No:- TGS0585905

Recent Questions Asked Electrical Engineering

Q : How can you make a low-pass filter with proper cut-off

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