Vacuum Systems
Research a type of pump that we did NOT discuss: the ion pump
- What are the principles of operation?
- What is its ultimate pressure?
- What limits its performance practically?
- What type of system is it generally used on?
Thin Films
Research and describe a layering technology we did NOT discuss: Atomic Layer Deposition (ALD)
• What type of deposition is this and how does it differ from other techniques of the same type?
• What are the key components/reactions?
• Describe the process
• Give at least one example of its use in current (>2000) literature (describe why it was important in that case)