Question: Use a lumped-parameter model and the analytical transfer function approach to calculate the frequency-domain response of the mechanical microsystem sketched in Figure when a sinusoidal input force is applied to the shuttle mass in the motion direction. Use MATLAB® to verify the analytical results. Each of the two identical end springs has three flexible beams of circular cross section with d = 1 nm, l1 = 10 nm, l2 = 30 nm, and E = 1.5 # 1011 N/m2 . The mass of the shuttle mass is m = 200 ng and the coefficient of viscous damping between the mass and the surrounding gas is c = 0.004 N-s/m.
