Aume that an as i mplant leads to a uniform


1. Calculate the resistivity using the van der Pauw method with measured current IA 8=1 mA and VCD=2V. The length L= 1mm and width W=2 mm.

2. Assume that an As i mplant leads to a uniform electron concentration of 1019 cm·3 down to a depth of 0.1 µm and a mobility of 100 cm2 .V1 .s·1 . Determ ine the resistivity and the sheet resisti vity of the implanted layer. If a square van der Pauw pattern with 1 cm side length is used with a 10 V applied at two adjacent contacts, what current would be measured through the other two contacts?

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Chemical Engineering: Aume that an as i mplant leads to a uniform
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